The imaging capability of conventional lenses is mainly limited by the diffraction of light, and the so-called superlens has been developed allowing the recovery of evanescent waves in the focal plane. However, the remarkable focusing behavior of the superlens is greatly confined in the near-field regime due to the exponential decay of evanescent waves. To tackle this issue, we design a waveguide metasurface-based superlens with an extraordinary quasi-far-field focusing capability beyond the diffraction limit in the present work. Specifically, we analyze the underlying physical mechanism and provide experimental verification of the proposed superlens. The metasurface superlens is formed by an array of gradient nanoslits perforated in a gold slab, and supports transverse-electric (TE) waveguide modes under linearly polarized illumination along the long axis of the slits. Numerical results illustrate that exciting such TE waveguide modes can modulate not only optical phase but also evanescent waves. Consequently, some high-spatial-frequency waves can contribute to the focusing of the superlens, leading to the quasi-far-field super-resolution focusing of light. Under 405 nm illumination and oil immersion, the fabricated superlens shows a focus spot of 98 nm (i.e. λ/4.13) at a focal distance of 1.49 μm (i.e. 3.68λ) using an oil immersion objective, breaking the diffraction limit of λ/2.38 in the quasi-far field regime. The developed metasurface optical superlens with such extraordinary capabilities promises exciting avenues to nanolithography and ultra-small optoelectronic devices.

Airy optical beams have emerged to hold enormous theoretical and experimental research interest due to their outstanding characteristics. Conventional approaches suffer from bulky and costly systems, as well as poor phase discretization. The newly developed metasurface-based Airy beam generators have constraints of polarization dependence or limited generation efficiency. Here, we experimentally demonstrate a polarization-independent silicon dielectric metasurface for generation of high-efficiency Airy optical beams. In our implementation, rather than synchronous manipulation of the amplitude and phase by plasmonic or Huygens’ metasurfaces, we employ and impose a 3/2 phase-only manipulation to the dielectric metasurface, consisting of an array of silicon nanopillars with an optimized transmission efficiency as high as 97%. The resultant Airy optical beams possess extraordinarily large deflection angles and relatively narrow beam widths. Our validated scheme will open up a fascinating doorway to broaden the application scenarios of Airy optical beams on ultracompact photonic platforms.